A 0.08p2-sized 8F2 Stack DRAM cell for multi-Gigabit DRAM
Hyunpil Noh, Suock Jeong, Seongjoon Lee, Yousung Kim, Woncheol Cho, Min Huh, Gucheol Jeong,
Jaebuhm Suh, Hoyeop Kweon, Jaesung Roh, Kisoo Shin, and Sangdon Lee
Device BT Team, Memory R&D Division, Hynix Semiconductor Co. LTD, San 136-1, Ami-Ri,
Bubal-Eun Ichon-Si. Kvungki-Do. 467-70 1 Korea
Abstract
The first 8F2 Stack DRAM cell with 0.08pm’ size has
been successfully integrated employing poly plug scheme
for landing plug cont...
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Approximate pages: 4 (250 words per
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